The Parameter Set for the Diffusion of Oxygen in Silicon

question 13

Multiple Choice

The parameter set for the diffusion of oxygen in silicon contains the pair of points (ln(D) , 1/T) with values (-28.42, 6.0 × 10^-4) and (-34.54, 8.0 × 10^-4) . What is the activation energy in eV?

• A)5.28 eV
• B)2.64 eV
• C)2.04 eV
• D)1.31 eV

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